{"id":1,"date":"2021-08-17T00:00:31","date_gmt":"2021-08-16T23:00:31","guid":{"rendered":"http:\/\/hebergement.u-psud.fr\/wptest\/?p=1"},"modified":"2024-12-18T23:10:44","modified_gmt":"2024-12-18T22:10:44","slug":"focused-ion-beam-scanning-electron-microscope-fib-sem","status":"publish","type":"post","link":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/?p=1","title":{"rendered":"Focused- IOn-BEAM Scanning electron Microscope FIB-SEM"},"content":{"rendered":"\n<p class=\"justification_texte\">L\u2019instrumentation a disposition est constitu\u00e9 d\u2019un microscope \u00e9lectronique \u00e0 balayage de type Zeiss 1540, \u00e9quip\u00e9 de la colonne \u00e9lectronique Ultra Haute R\u00e9solution Gemini\u00ae et d\u2019une colonne ionique filtr\u00e9e en masse&nbsp;&nbsp;Orsay physics.<\/p>\n\n\n\n<p>Les sp\u00e9cifications sont les suivantes&nbsp;:<\/p>\n\n\n\n<p><strong>Colonne \u00e9lectron Gemini&nbsp;:<\/strong><\/p>\n\n\n\n<ul><li>source de type FEG-Schottky&nbsp;&nbsp;<\/li><li>Tension d\u2019acc\u00e9l\u00e9ration variable en continu de 100 V \u00e0 30 kV<\/li><li>R\u00e9solution&nbsp;: 1,1 nm \u00e0 20 kV&nbsp;&nbsp;et&nbsp;&nbsp;2,5 nm \u00e0 1 kV<\/li><li>Courant de sonde&nbsp;: 4 pA \u00e0 20 nA<\/li><\/ul>\n\n\n\n<p><strong>Colonne ions 30keV &nbsp;:<\/strong><\/p>\n\n\n\n<ul><li>Orsay physics avec filtre de Wien&nbsp;&nbsp;-&gt; sources Au+, Ga+, Si+<\/li><li>Faisceaux pr\u00e9r\u00e9gl\u00e9s&nbsp;: 5n 1n 500p 200p 100p 50p 10p 3p&nbsp;<\/li><\/ul>\n\n\n\n<p><strong>D\u00e9tecteurs disponibles:<\/strong><\/p>\n\n\n\n<ul><li>D\u00e9tecteur de type Everhart Thornley pour la d\u00e9tection des \u00e9lectrons secondaires&nbsp;: SE2<\/li><li>D\u00e9tecteur 4 quadrants pour la d\u00e9tection des \u00e9lectrons r\u00e9trodiffus\u00e9s haute tension&nbsp;: AsB<\/li><li>D\u00e9tecteur annulaire haute performance pour la d\u00e9tection des \u00e9lectrons secondaires basse tension&nbsp;: In-Lens (dans la colonne)<\/li><li>Cam\u00e9ra IR-CCD, pour la visualisation de l\u2019int\u00e9rieur de la chambre.<\/li><\/ul>\n\n\n\n<p class=\"justification_texte\">Microanalyseur EDS QUANTAX pour l\u2019analyse \u00e9l\u00e9mentaire X avec logiciel Esprit, (Hypermap, cartographie X, profils, point\u00e9s), HSQuant analyse avec t\u00e9moins (analyse X quantitative et\/ou semi-quantitative) avec correctif de d\u00e9rive d\u2019images<\/p>\n","protected":false},"excerpt":{"rendered":"<p>L\u2019instrumentation a disposition est constitu\u00e9 d\u2019un microscope \u00e9lectronique \u00e0 balayage de type Zeiss 1540, \u00e9quip\u00e9 de la colonne \u00e9lectronique Ultra Haute R\u00e9solution Gemini\u00ae et d\u2019une colonne ionique filtr\u00e9e en masse&nbsp;&nbsp;Orsay physics. Les sp\u00e9cifications sont les suivantes&nbsp;: Colonne \u00e9lectron Gemini&nbsp;: source de type FEG-Schottky&nbsp;&nbsp; Tension d\u2019acc\u00e9l\u00e9ration variable en continu de 100 V \u00e0 30 kV R\u00e9solution&nbsp;: [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":8,"comment_status":"closed","ping_status":"closed","sticky":true,"template":"elementor_theme","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[],"_links":{"self":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/1"}],"collection":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1"}],"version-history":[{"count":12,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/1\/revisions"}],"predecessor-version":[{"id":132,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/1\/revisions\/132"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/media\/8"}],"wp:attachment":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}