{"id":215,"date":"2021-07-06T09:41:00","date_gmt":"2021-07-06T08:41:00","guid":{"rendered":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/?p=215"},"modified":"2021-10-07T11:35:53","modified_gmt":"2021-10-07T10:35:53","slug":"les-depots-sous-faisceau","status":"publish","type":"post","link":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/?p=215","title":{"rendered":"LEs d\u00e9pots sous faisceaU"},"content":{"rendered":"\n

L\u2019\u00e9criture directe de nanostructure avec une largeur de trait de l\u2019ordre de la centaine de nanom\u00e8tre fait partie des proc\u00e9d\u00e9s de synth\u00e8se les plus int\u00e9ressant, disponible sur ce microscope dual-beam. L\u2019\u00e9nergie apport\u00e9e par un faisceau d\u2019\u00e9lectrons ou d\u2019ions focalis\u00e9s, est utilis\u00e9e pour induire la d\u00e9composition des mol\u00e9cules d\u2019un pr\u00e9curseur gazeux organom\u00e9tallique inject\u00e9 au voisinage de la surface. <\/p>\n\n\n\n

\"D\u00e9pot<\/a><\/figure><\/div>\n\n\n\n

Le \u00ab nano-d\u00e9p\u00f4t \u00bb est ainsi obtenu le long du trajet suivit par le faisceau d\u2019\u00e9lectrons ou d\u2019ions lorsque les conditions de flux et de pression partiel du gaz pr\u00e9curseur sont r\u00e9unies.  C\u2019est un outils id\u00e9al pour modifier les nanostructures ou les relier aux monde macroscopique. Suivant la nature du faisceau utilis\u00e9, on retrouve ces m\u00e9thodes de d\u00e9p\u00f4t sous les sigles FIBID (Focus Ions Beam Induced Deposition) ou FEBID ( Focus Electron Beam Induced Deposition) .<\/p>\n\n\n\n

Pr\u00e9curseurs disponibles sur notre syst\u00e8mes :<\/strong><\/p>\n\n\n\n\n\n\n\t\n\n\t\n\t\n\t
\u00c9l\u00e9ments d\u00e9pos\u00e9s<\/th>Pr\u00e9curseur<\/th>Propri\u00e9t\u00e9es<\/th>\n<\/tr>\n<\/thead>\n
Tungsten - Carbon 70%-30%<\/td>Tungsten hexacarbonyl W(CO)6<\/td>Supra Tc \u2208 [4;5] \u00b0K Hcrit ~ 10 Tesla<\/td>\n<\/tr>\n
Platine - Carbon 70%-30%<\/td>(CH5)5Pt(CH3)3<\/td>M\u00e9tallique<\/td>\n<\/tr>\n
SiOx<\/td>2, 4, 6, 8, 10-pentamethyl-cyclopenta-siloxane C5H20O5Si5<\/td>Isolant<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n\n
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\n \"Visual\n <\/div>\n <\/div>\n
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Chamber_with_nozel<\/h3>\n <\/div>\n
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<\/div>\n\n <\/a> <\/div>\n<\/div>\n\n
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\n Vue de la chambre en configuration d\u00e9p\u00f4t <\/a><\/h2>\n <\/div>\n <\/div>\n <\/figcaption>\n <\/figure>\n <\/div>\n \n
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Buse_probe<\/h3>\n <\/div>\n
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\n \n \"\"\n
<\/div>\n\n <\/a> <\/div>\n<\/div>\n\n
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\n Buse en position<\/a><\/h2>\n <\/div>\n <\/div>\n <\/figcaption>\n <\/figure>\n <\/div>\n \n<\/div>\n <\/div>\n \n<\/div>\n <\/div>\n <\/div>\n<\/div>\n\n\n
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\n \"Visual\n <\/div>\n <\/div>\n
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D\u00e9pot_contact_W<\/h3>\n <\/div>\n
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<\/div>\n\n <\/a> <\/div>\n<\/div>\n\n
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\n D\u00e9pot de W : r\u00e9alisation de contacts sur nanofils de Bi<\/a><\/h2>\n <\/div>\n <\/div>\n <\/figcaption>\n <\/figure>\n <\/div>\n \n
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Squids<\/h3>\n <\/div>\n
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\n \n \"D\u00e9pots\n
<\/div>\n\n <\/a> <\/div>\n<\/div>\n\n
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\n fabrication de structures par d\u00e9p\u00f4t et gravure <\/a><\/h2>\n <\/div>\n <\/div>\n <\/figcaption>\n <\/figure>\n <\/div>\n \n<\/div>\n <\/div>\n \n<\/div>\n <\/div>\n ","protected":false},"excerpt":{"rendered":"

L\u2019\u00e9criture directe de nanostructure avec une largeur de trait de l\u2019ordre de la centaine de nanom\u00e8tre fait partie des proc\u00e9d\u00e9s de synth\u00e8se les plus int\u00e9ressant, disponible sur ce microscope dual-beam. L\u2019\u00e9nergie apport\u00e9e par un faisceau d\u2019\u00e9lectrons ou d\u2019ions focalis\u00e9s, est utilis\u00e9e pour induire la d\u00e9composition des mol\u00e9cules d\u2019un pr\u00e9curseur gazeux organom\u00e9tallique inject\u00e9 au voisinage de […]<\/p>\n","protected":false},"author":1,"featured_media":225,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[],"_links":{"self":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/215"}],"collection":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=215"}],"version-history":[{"count":36,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/215\/revisions"}],"predecessor-version":[{"id":282,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/posts\/215\/revisions\/282"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=\/wp\/v2\/media\/225"}],"wp:attachment":[{"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=215"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=215"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/hebergement.universite-paris-saclay.fr\/SEMFIB\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=215"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}